KEYENCE VR-3200 Industrial Microscope 3D Shape Measuring Machine Profilometer
Despite being described as an industrial microscope or profilometer in some listings, it is more accurately a wide-area 3D optical shape measurement system rather than a conventional contact profilometer.
What can it measure?
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3D surface shape: Creates a three-dimensional representation of a part’s surface.
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Height and step differences: Measures height variations between surfaces.
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Depth and geometry: Evaluates grooves, recesses, holes, and other surface features within its measurement capabilities.
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Dimensions: Measures lengths, widths, distances, angles, and other geometric characteristics supported by its software.
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Surface defects: Helps inspect scratches, burrs, uneven surfaces, molding defects, and machining errors.
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Volume and surface profiles: Supports analysis of selected 3D features and cross-sectional profiles.
Key technical specifications
According to KEYENCE’s official specifications:
| Specification | VR-3200 |
|---|---|
| Measurement type | Non-contact optical 3D measurement |
| Compatible controller | VR-3000K |
| Height measurement accuracy | ±3 µm under specified conditions |
| Height repeatability | 0.5 µm (σ) |
| Height display resolution | 0.1 µm |
| Measurable height range | 10 mm wide-field; 1 mm high-magnification |
| Magnification | 12×–160×, depending on mode |
| Working distance | 75 mm |
| XY stage travel | 184 × 88 mm |
| Z-stage travel | 90 mm |
| Sample rotation | ±180° |
| Weight of head | Approximately 28 kg |
Important: Accuracy and repeatability figures depend on the measurement mode, calibration standard, and specified test conditions. Display resolution is not the same as measurement accuracy.
How does it work?
1. Place the component
Position the workpiece on the measurement stage. The instrument uses optical imaging rather than a mechanical probe touching the surface.
2. Capture the 3D surface
The optical system captures surface information to create a 3D representation of the component.
3. Analyze and measure
Use the compatible software to inspect height differences, dimensions, profiles, and surface features.
Is it still available?
The VR-3200 is discontinued according to KEYENCE’s official product pages. KEYENCE identifies the VR-6200 as a recommended replacement model.
For someone considering a used unit, the complete system matters: the VR-3200 head, compatible VR-3000K controller, dedicated computer, measurement software, and any required accessories. Confirm compatibility and software availability before purchasing.
Price and used-market value
A product listing surfaced at approximately €21,900 for a KEYENCE VR-3200, but this is an indicative listing price, not a verified completed-sale price. The condition and included components can substantially affect value.
Before buying, check:
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Whether the controller and computer are included.
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Whether the system powers on and completes measurements.
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Whether calibration can be verified.
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Whether the software, license, and installation media are included.
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Whether service and spare parts are available.




















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